JAXA Repository / AIREX 未来へ続く、宙(そら)への英知

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titleSOI技術による高温対応型高精度スマートマイクロセンサ
Other TitlePrecision Smart Microsensors with SOI Technology Highly Resistant to High-Temperature Environments
Author(jpn)高尾, 英邦
Author(eng)Takao, Hidekuni
Author Affiliation(jpn)豊橋技術科学大学工学部電気・電子工学系
Author Affiliation(eng)Department of Electrical and Electronic Engineering, Faculty of Engineering, Toyohashi University of Technology
Issue Date2005-06
Publisher宇宙航空研究開発機構宇宙科学研究本部 (JAXA)(ISAS)
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)
Publication title第15回高温エレクトロニクス研究会
Proceedings of the 15th ISAS Research Meeting on HIGH TEMPERATURE ELECTRONICS
Start page52
End page64
Publication date2005-06
Languagejpn
Description会議情報: 第15回高温エレクトロニクス研究会(2005年2月22日. 宇宙航空研究開発機構宇宙科学研究本部(JAXA)(ISAS)), 相模原市, 神奈川県
Meeting Information: 15th ISAS Research Meeting on HIGH TEMPERATURE ELECTRONICS (February 22, 2005. Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)), Sagamihara, Kanagawa Japan
Document TypeConference Paper
JAXA Categoryシンポジウム・研究会
SHI-NOSA6000027006
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/13201


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