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titleBatch bulk-micromachined high-precision metal-on-insulator microspires and their application to scanning tunneling microscopy
DOIinfo:doi/10.1088/0960-1317/14/9/013
Reference URLhttp://iopscience.iop.org/0960-1317/14/9/013
Author(jpn)小林, 大輔; 三田, 吉郎; 柴田, 直; 藤田, 博之
Author(eng)Kobayashi, Daisuke; Mita, Yoshio; Shibata, Tadashi; Bourouina, Tarik; Fujita, Hiroyuki
Author Affiliation(jpn)東京大学; 東京大学; 東京大学; 東京大学
Author Affiliation(eng)Department of Frontier Informatics, School of Frontier Sciences, The University of Tokyo; Department of Electrical Engineering, School of Engineering, The University of Tokyo; Department of Frontier Informatics, School of Frontier Sciences, The University of Tokyo; Ecole Superieure d'Ingenieurs en Electronique et Electrotechnique; Center for International Research on MicroMechatronics/Institute of Industrial Science, The University of Tokyo
Issue Date2004-09
PublisherInstitute of Physics
Publication titleJournal of Micromechanics and Microengineering
Volume14
Issue9
Start pageS76
End pageS81
Publication date2004-09
Languageeng
Document TypeJournal Article
JAXA Category学術雑誌論文
ISSN0960-1317
NCIDAA10804010
SHI-NOSA1001121000
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/13235


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