WEKO3
アイテム
{"_buckets": {"deposit": "4875a4fb-adc0-4960-b9e4-6534e970c927"}, "_deposit": {"created_by": 1, "id": "12537", "owners": [1], "pid": {"revision_id": 0, "type": "depid", "value": "12537"}, "status": "published"}, "_oai": {"id": "oai:jaxa.repo.nii.ac.jp:00012537", "sets": ["1626", "1891"]}, "author_link": ["110388", "110384", "110385", "110387", "110396", "110399", "110394", "110386", "110381", "110382", "110392", "110391", "110400", "110383", "110393", "110397", "110389", "110398", "110395", "110390"], "item_5_alternative_title_2": {"attribute_name": "その他のタイトル(英)", "attribute_value_mlt": [{"subitem_alternative_title": "Growth of SiC thin films in terms of plasma CVD: Toward the growth of SiC microcrystals at 300 C"}]}, "item_5_biblio_info_10": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-06", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "4", "bibliographicPageStart": "1", "bibliographicVolumeNumber": "平成20年度", "bibliographic_titles": [{"bibliographic_title": "スペース・プラズマ研究会"}]}]}, "item_5_description_14": {"attribute_name": "会議概要(会議名, 開催地, 会期, 主催者等)", "attribute_value_mlt": [{"subitem_description": "平成20年度スペース・プラズマ研究会(2009年3月5日-6日, 宇宙航空研究開発機構宇宙科学研究本部)", "subitem_description_type": "Other"}]}, "item_5_description_18": {"attribute_name": "内容記述", "attribute_value_mlt": [{"subitem_description": "著者人数: 11名", "subitem_description_type": "Other"}]}, "item_5_description_32": {"attribute_name": "資料番号", "attribute_value_mlt": [{"subitem_description": "資料番号: AA0064296001", "subitem_description_type": "Other"}]}, "item_5_publisher_8": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "宇宙航空研究開発機構宇宙科学研究本部"}]}, "item_5_publisher_9": {"attribute_name": "出版者(英)", "attribute_value_mlt": [{"subitem_publisher": "Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)"}]}, "item_5_source_id_24": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AN10323965", "subitem_source_identifier_type": "NCID"}]}, "item_5_text_35": {"attribute_name": "JAXAカテゴリ", "attribute_value_mlt": [{"subitem_text_value": "JAXAカテゴリ: シンポジウム・研究会"}]}, "item_5_text_36": {"attribute_name": "JAXAカテゴリ2", "attribute_value_mlt": [{"subitem_text_value": "JAXAカテゴリ2: IS"}]}, "item_5_text_42": {"attribute_name": "シンポジウム区分", "attribute_value_mlt": [{"subitem_text_value": "シンポジウム区分: 006"}]}, "item_5_text_43": {"attribute_name": "DSpaceコレクション番号", "attribute_value_mlt": [{"subitem_text_value": "DSpaceコレクション番号: 7"}]}, "item_5_text_6": {"attribute_name": "著者所属", "attribute_value_mlt": [{"subitem_text_value": "東京理科大学理学部応用物理学科"}, {"subitem_text_value": "東京理科大学理学部応用物理学科"}, {"subitem_text_value": "群馬大学工学部"}, {"subitem_text_value": "東京理科大学理学部応用物理学科"}, {"subitem_text_value": "東京理科大学理学部応用物理学科"}, {"subitem_text_value": "東京理科大学理学部応用物理学科"}, {"subitem_text_value": "東京理科大学理学部応用物理学科"}, {"subitem_text_value": "東京理科大学理学部応用物理学科"}, {"subitem_text_value": "東京理科大学理学部応用物理学科"}, {"subitem_text_value": "東京理科大学理学部応用物理学科"}]}, "item_5_text_7": {"attribute_name": "著者所属(英)", "attribute_value_mlt": [{"subitem_text_language": "en", "subitem_text_value": "Department of Applied Physics, Faculty of Science, Science University of Tokyo"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Applied Physics, Faculty of Science, Science University of Tokyo"}, {"subitem_text_language": "en", "subitem_text_value": "Faculty of Engineering, Gunma University"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Applied Physics, Faculty of Science, Science University of Tokyo"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Applied Physics, Faculty of Science, Science University of Tokyo"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Applied Physics, Faculty of Science, Science University of Tokyo"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Applied Physics, Faculty of Science, Science University of Tokyo"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Applied Physics, Faculty of Science, Science University of Tokyo"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Applied Physics, Faculty of Science, Science University of Tokyo"}, {"subitem_text_language": "en", "subitem_text_value": "Department of Applied Physics, Faculty of Science, Science University of Tokyo"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "metadata only access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_14cb"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "金子, 聰"}], "nameIdentifiers": [{"nameIdentifier": "110381", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "宮川, 宣明"}], "nameIdentifiers": [{"nameIdentifier": "110382", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "曽根, 逸人"}], "nameIdentifiers": [{"nameIdentifier": "110383", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "山崎, 弘祥"}], "nameIdentifiers": [{"nameIdentifier": "110384", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "根本, 大"}], "nameIdentifiers": [{"nameIdentifier": "110385", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "竹田, 敢"}], "nameIdentifiers": [{"nameIdentifier": "110386", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "細川, 雄一朗"}], "nameIdentifiers": [{"nameIdentifier": "110387", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "小野, 亜樹子"}], "nameIdentifiers": [{"nameIdentifier": "110388", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "泰井, まどか"}], "nameIdentifiers": [{"nameIdentifier": "110389", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "長田, 英樹"}], "nameIdentifiers": [{"nameIdentifier": "110390", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kaneko, Tsutomu", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "110391", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Miyakawa, Nobuaki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "110392", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sone, Hayato", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "110393", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Yamazaki, Hiroyoshi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "110394", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Nemoto, Dai", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "110395", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Takeda, Isamu", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "110396", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Hosokawa, Yuichiro", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "110397", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ono, Akiko", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "110398", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Taii, Madoka", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "110399", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Osada, Hideki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "110400", "nameIdentifierScheme": "WEKO"}]}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "conference paper", "resourceuri": "http://purl.org/coar/resource_type/c_5794"}]}, "item_title": "プラズマCVDを中心とするSiC薄膜の成長: 300CでのSiC微結晶育成に向けて", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "プラズマCVDを中心とするSiC薄膜の成長: 300CでのSiC微結晶育成に向けて"}]}, "item_type_id": "5", "owner": "1", "path": ["1626", "1891"], "permalink_uri": "https://jaxa.repo.nii.ac.jp/records/12537", "pubdate": {"attribute_name": "公開日", "attribute_value": "2015-03-26"}, "publish_date": "2015-03-26", "publish_status": "0", "recid": "12537", "relation": {}, "relation_version_is_last": true, "title": ["プラズマCVDを中心とするSiC薄膜の成長: 300CでのSiC微結晶育成に向けて"], "weko_shared_id": -1}
プラズマCVDを中心とするSiC薄膜の成長: 300CでのSiC微結晶育成に向けて
https://jaxa.repo.nii.ac.jp/records/12537
https://jaxa.repo.nii.ac.jp/records/1253792fedecb-2895-4dce-8239-97bebe13626a
Item type | 会議発表論文 / Conference Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2015-03-26 | |||||
タイトル | ||||||
タイトル | プラズマCVDを中心とするSiC薄膜の成長: 300CでのSiC微結晶育成に向けて | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
その他のタイトル(英) | ||||||
その他のタイトル | Growth of SiC thin films in terms of plasma CVD: Toward the growth of SiC microcrystals at 300 C | |||||
著者 |
金子, 聰
× 金子, 聰× 宮川, 宣明× 曽根, 逸人× 山崎, 弘祥× 根本, 大× 竹田, 敢× 細川, 雄一朗× 小野, 亜樹子× 泰井, まどか× 長田, 英樹× Kaneko, Tsutomu× Miyakawa, Nobuaki× Sone, Hayato× Yamazaki, Hiroyoshi× Nemoto, Dai× Takeda, Isamu× Hosokawa, Yuichiro× Ono, Akiko× Taii, Madoka× Osada, Hideki |
|||||
著者所属 | ||||||
東京理科大学理学部応用物理学科 | ||||||
著者所属 | ||||||
東京理科大学理学部応用物理学科 | ||||||
著者所属 | ||||||
群馬大学工学部 | ||||||
著者所属 | ||||||
東京理科大学理学部応用物理学科 | ||||||
著者所属 | ||||||
東京理科大学理学部応用物理学科 | ||||||
著者所属 | ||||||
東京理科大学理学部応用物理学科 | ||||||
著者所属 | ||||||
東京理科大学理学部応用物理学科 | ||||||
著者所属 | ||||||
東京理科大学理学部応用物理学科 | ||||||
著者所属 | ||||||
東京理科大学理学部応用物理学科 | ||||||
著者所属 | ||||||
東京理科大学理学部応用物理学科 | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Science University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Science University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Faculty of Engineering, Gunma University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Science University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Science University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Science University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Science University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Science University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Science University of Tokyo | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Applied Physics, Faculty of Science, Science University of Tokyo | ||||||
出版者 | ||||||
出版者 | 宇宙航空研究開発機構宇宙科学研究本部 | |||||
出版者(英) | ||||||
出版者 | Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA) | |||||
書誌情報 |
スペース・プラズマ研究会 巻 平成20年度, p. 1-4, 発行日 2009-06 |
|||||
会議概要(会議名, 開催地, 会期, 主催者等) | ||||||
内容記述タイプ | Other | |||||
内容記述 | 平成20年度スペース・プラズマ研究会(2009年3月5日-6日, 宇宙航空研究開発機構宇宙科学研究本部) | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 著者人数: 11名 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN10323965 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: AA0064296001 |