タイトル | The Properties of CrN/Au and Cr/CrN/Au Multilayers |
著者(英) | Lie, D.; Scott-Monck, J.; Reid, J.; Tai, B.; Kolawa, E.; Lowry, L. |
発行日 | 1994-04-25 |
言語 | eng |
内容記述 | Gold has been used as a conductor material in many microelectronic applications because of its low resistivity, bondability, and oxidation/corrosion resistance. |
権利 | Copyright |
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