WEKO3
アイテム
{"_buckets": {"deposit": "a4be0fc3-aaee-441b-966a-4f4f1238c044"}, "_deposit": {"created_by": 1, "id": "13873", "owners": [1], "pid": {"revision_id": 0, "type": "depid", "value": "13873"}, "status": "published"}, "_oai": {"id": "oai:jaxa.repo.nii.ac.jp:00013873", "sets": ["1647", "1891"]}, "author_link": ["127361", "127365", "127370", "127360", "127371", "127362", "127369", "127368", "127367", "127366", "127363", "127364"], "item_5_alternative_title_2": {"attribute_name": "その他のタイトル(英)", "attribute_value_mlt": [{"subitem_alternative_title": "In-situ diagnostics with optical emission spectroscopy for DC-plasma diamond CVD in high gravity"}]}, "item_5_biblio_info_10": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2004-03", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "219", "bibliographicPageStart": "216", "bibliographic_titles": [{"bibliographic_title": "宇宙利用シンポジウム 第20回 平成15年度"}, {"bibliographic_title": "Space Utilization Research: Proceedings of the Twentieth Space Utilization Symposium", "bibliographic_titleLang": "en"}]}]}, "item_5_description_17": {"attribute_name": "抄録(英)", "attribute_value_mlt": [{"subitem_description": "Although it was confirmed that nucleation density and crystal growth rate in the diamond thin films by means of DC-plasma CVD were increased with increasing gravity, the reasons of these effects have not clearly been explained. To this end, an OES (optical emission spectroscopy) apparatus was installed in the high gravity equipment. In-situ plasma diagnostics enabled identification of the active species in the plasma, and a series of experiments were conducted for various experimental conditions with gravity, substrate temperatures, and methane concentration as the parameters.", "subitem_description_type": "Other"}]}, "item_5_description_32": {"attribute_name": "資料番号", "attribute_value_mlt": [{"subitem_description": "資料番号: AA0046917068", "subitem_description_type": "Other"}]}, "item_5_publisher_8": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "宇宙航空研究開発機構宇宙科学研究本部"}]}, "item_5_publisher_9": {"attribute_name": "出版者(英)", "attribute_value_mlt": [{"subitem_publisher": "Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA/ISAS)"}]}, "item_5_text_20": {"attribute_name": "その他キーワード", "attribute_value_mlt": [{"subitem_text_value": "プラズマ物理学"}, {"subitem_text_value": "流体力学及び熱伝導"}]}, "item_5_text_35": {"attribute_name": "JAXAカテゴリ", "attribute_value_mlt": [{"subitem_text_value": "JAXAカテゴリ: シンポジウム・研究会"}]}, "item_5_text_36": {"attribute_name": "JAXAカテゴリ2", "attribute_value_mlt": [{"subitem_text_value": "JAXAカテゴリ2: IS"}]}, "item_5_text_42": {"attribute_name": "シンポジウム区分", "attribute_value_mlt": [{"subitem_text_value": "シンポジウム区分: 008"}]}, "item_5_text_43": {"attribute_name": "DSpaceコレクション番号", "attribute_value_mlt": [{"subitem_text_value": "DSpaceコレクション番号: 7"}]}, "item_5_text_6": {"attribute_name": "著者所属", "attribute_value_mlt": [{"subitem_text_value": "帝京科学大学"}, {"subitem_text_value": "帝京科学大学"}, {"subitem_text_value": "帝京科学大学"}, {"subitem_text_value": "帝京科学大学"}, {"subitem_text_value": "帝京科学大学"}, {"subitem_text_value": "帝京科学大学"}]}, "item_5_text_7": {"attribute_name": "著者所属(英)", "attribute_value_mlt": [{"subitem_text_language": "en", "subitem_text_value": "Teikyo University of Science and Technology"}, {"subitem_text_language": "en", "subitem_text_value": "Teikyo University of Science and Technology"}, {"subitem_text_language": "en", "subitem_text_value": "Teikyo University of Science and Technology"}, {"subitem_text_language": "en", "subitem_text_value": "Teikyo University of Science and Technology"}, {"subitem_text_language": "en", "subitem_text_value": "Teikyo University of Science and Technology"}, {"subitem_text_language": "en", "subitem_text_value": "Teikyo University of Science and Technology"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "metadata only access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_14cb"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "田中, 勇紀"}], "nameIdentifiers": [{"nameIdentifier": "127360", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Tappero, Fabrizio"}], "nameIdentifiers": [{"nameIdentifier": "127361", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "阿部, 宜之"}], "nameIdentifiers": [{"nameIdentifier": "127362", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "田口, 浩史"}], "nameIdentifiers": [{"nameIdentifier": "127363", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "行田, 薫"}], "nameIdentifiers": [{"nameIdentifier": "127364", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "高木, 喜樹"}], "nameIdentifiers": [{"nameIdentifier": "127365", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Tanaka, Yuki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "127366", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Tappero, Fabrizio", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "127367", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Abe, Yoshiyuki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "127368", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Taguchi, Hiroshi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "127369", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Gyoda, Kaoru", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "127370", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Takagi, Yoshiki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "127371", "nameIdentifierScheme": "WEKO"}]}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "OES", "subitem_subject_scheme": "Other"}, {"subitem_subject": "CVD", "subitem_subject_scheme": "Other"}, {"subitem_subject": "過重力", "subitem_subject_scheme": "Other"}, {"subitem_subject": "プラズマ診断", "subitem_subject_scheme": "Other"}, {"subitem_subject": "核形成", "subitem_subject_scheme": "Other"}, {"subitem_subject": "ダイヤモンド薄膜", "subitem_subject_scheme": "Other"}, {"subitem_subject": "結晶成長", "subitem_subject_scheme": "Other"}, {"subitem_subject": "SEM", "subitem_subject_scheme": "Other"}, {"subitem_subject": "OES", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "CVD", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "hypergravity", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "plasma diagnostics", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "nucleation", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "diamond film", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "crystal growth", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}, {"subitem_subject": "SEM", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "conference paper", "resourceuri": "http://purl.org/coar/resource_type/c_5794"}]}, "item_title": "高重力環境下におけるプラズマの発光分光のその場診断:ダイヤモンドCVD合成への応用", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "高重力環境下におけるプラズマの発光分光のその場診断:ダイヤモンドCVD合成への応用"}]}, "item_type_id": "5", "owner": "1", "path": ["1647", "1891"], "permalink_uri": "https://jaxa.repo.nii.ac.jp/records/13873", "pubdate": {"attribute_name": "公開日", "attribute_value": "2015-03-26"}, "publish_date": "2015-03-26", "publish_status": "0", "recid": "13873", "relation": {}, "relation_version_is_last": true, "title": ["高重力環境下におけるプラズマの発光分光のその場診断:ダイヤモンドCVD合成への応用"], "weko_shared_id": -1}
高重力環境下におけるプラズマの発光分光のその場診断:ダイヤモンドCVD合成への応用
https://jaxa.repo.nii.ac.jp/records/13873
https://jaxa.repo.nii.ac.jp/records/13873fb090eff-43a9-4a55-b427-1501f6460bc1
Item type | 会議発表論文 / Conference Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2015-03-26 | |||||
タイトル | ||||||
タイトル | 高重力環境下におけるプラズマの発光分光のその場診断:ダイヤモンドCVD合成への応用 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | OES | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | CVD | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 過重力 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | プラズマ診断 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 核形成 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ダイヤモンド薄膜 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 結晶成長 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | SEM | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | OES | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | CVD | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | hypergravity | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | plasma diagnostics | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | nucleation | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | diamond film | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | crystal growth | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | SEM | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
その他のタイトル(英) | ||||||
その他のタイトル | In-situ diagnostics with optical emission spectroscopy for DC-plasma diamond CVD in high gravity | |||||
著者 |
田中, 勇紀
× 田中, 勇紀× Tappero, Fabrizio× 阿部, 宜之× 田口, 浩史× 行田, 薫× 高木, 喜樹× Tanaka, Yuki× Tappero, Fabrizio× Abe, Yoshiyuki× Taguchi, Hiroshi× Gyoda, Kaoru× Takagi, Yoshiki |
|||||
著者所属 | ||||||
帝京科学大学 | ||||||
著者所属 | ||||||
帝京科学大学 | ||||||
著者所属 | ||||||
帝京科学大学 | ||||||
著者所属 | ||||||
帝京科学大学 | ||||||
著者所属 | ||||||
帝京科学大学 | ||||||
著者所属 | ||||||
帝京科学大学 | ||||||
著者所属(英) | ||||||
en | ||||||
Teikyo University of Science and Technology | ||||||
著者所属(英) | ||||||
en | ||||||
Teikyo University of Science and Technology | ||||||
著者所属(英) | ||||||
en | ||||||
Teikyo University of Science and Technology | ||||||
著者所属(英) | ||||||
en | ||||||
Teikyo University of Science and Technology | ||||||
著者所属(英) | ||||||
en | ||||||
Teikyo University of Science and Technology | ||||||
著者所属(英) | ||||||
en | ||||||
Teikyo University of Science and Technology | ||||||
出版者 | ||||||
出版者 | 宇宙航空研究開発機構宇宙科学研究本部 | |||||
出版者(英) | ||||||
出版者 | Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA/ISAS) | |||||
書誌情報 |
宇宙利用シンポジウム 第20回 平成15年度 en : Space Utilization Research: Proceedings of the Twentieth Space Utilization Symposium p. 216-219, 発行日 2004-03 |
|||||
抄録(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Although it was confirmed that nucleation density and crystal growth rate in the diamond thin films by means of DC-plasma CVD were increased with increasing gravity, the reasons of these effects have not clearly been explained. To this end, an OES (optical emission spectroscopy) apparatus was installed in the high gravity equipment. In-situ plasma diagnostics enabled identification of the active species in the plasma, and a series of experiments were conducted for various experimental conditions with gravity, substrate temperatures, and methane concentration as the parameters. | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: AA0046917068 |