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低地球軌道上の原子状酸素によるシリコン酸化膜形成とその特徴
https://jaxa.repo.nii.ac.jp/records/13898
https://jaxa.repo.nii.ac.jp/records/138987198d6ad-709a-495b-8fae-c41d382242be
Item type | 会議発表論文 / Conference Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2015-03-26 | |||||
タイトル | ||||||
タイトル | 低地球軌道上の原子状酸素によるシリコン酸化膜形成とその特徴 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | LEO | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 酸素原子 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | SiO2 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | MOS-FET | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 宇宙利用 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 原子酸素ビーム | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 結合エネルギー | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | X線光電子分光 | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | LEO | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | oxygen atom | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | SiO2 | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | MOS-FET | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | space utilization | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | atomic oxygen beam | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | binding energy | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | X-ray photoelectron spectroscopy | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
その他のタイトル(英) | ||||||
その他のタイトル | Characteristics of the formation of silicon dioxide film by atomic oxygen in LEO | |||||
著者 |
横田, 久美子
× 横田, 久美子× 大前, 伸夫× 田川, 雅人× Yokota, Kumiko× Omae, Nobuo× Tagawa, Masahito |
|||||
著者所属 | ||||||
神戸大学 工学部 機械工学科 | ||||||
著者所属 | ||||||
神戸大学 工学部 機械工学科 | ||||||
著者所属 | ||||||
神戸大学 工学部 機械工学科 | ||||||
著者所属(英) | ||||||
en | ||||||
Kobe University Department of Mechanical Engineering, Faculty of Engineering | ||||||
著者所属(英) | ||||||
en | ||||||
Kobe University Department of Mechanical Engineering, Faculty of Engineering | ||||||
著者所属(英) | ||||||
en | ||||||
Kobe University Department of Mechanical Engineering, Faculty of Engineering | ||||||
出版者 | ||||||
出版者 | 宇宙航空研究開発機構宇宙科学研究本部 | |||||
出版者(英) | ||||||
出版者 | Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA/ISAS) | |||||
書誌情報 |
宇宙利用シンポジウム 第20回 平成15年度 en : Space Utilization Research: Proceedings of the Twentieth Space Utilization Symposium p. 308-311, 発行日 2004-03 |
|||||
抄録(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | In this study it was tried to oxidize Si(001) with laser detonation-type hyperthermal atomic oxygen beam source, which simulated LEO environment. The experiment results showed that Si(001) could be oxidized by 5 eV atomic oxygen beam even at room temperature. It was also indicated that the growth of Si oxidized film followed Deal-Grove model at the later oxidation stage. In contract, the dependence on translational energy of atomic oxygen was confirmed at the initial oxidation stage. It was clear that atomic oxygen in LEO can be used as an effective oxidizing species. | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: AA0046917093 |