JAXA Repository / AIREX 未来へ続く、宙(そら)への英知

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title高重力環境下でのダイヤモンド合成におけるプラズマのその場診断
Other TitleIn-situ plasma diagnostics of diamond synthesized in high gravity
Author(jpn)田中 勇紀; 高木 喜樹; 行田 薫; 風間 康孝; Tappero, Fabrizio; 阿部 宜之
Author(eng)Tanaka, Yuki; Takagi, Yoshiki; Gyoda, Kaoru; Kazama, Yasutaka; Tappero, Fabrizio; Abe, Yoshiyuki
Author Affiliation(jpn)帝京科学大学; 帝京科学大学; 帝京科学大学; 帝京科学大学; 産業技術総合研究所; 産業技術総合研究所
Author Affiliation(eng)Teikyo University of Science and Technology; Teikyo University of Science and Technology; Teikyo University of Science and Technology; Teikyo University of Science and Technology; National Institute of Advanced Industrial Science and Technology; National Institute of Advanced Industrial Science and Technology
Issue Date2005-03
PublisherInstitute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA/ISAS)
宇宙航空研究開発機構宇宙科学研究本部
Publication title宇宙利用シンポジウム 第21回 平成16年度
Space Utilization Research: Proceedings of the Twenty-first Space Utilization Symposium
Start page67
End page70
Publication date2005-03
Languagejpn
AbstractThe increases in the nucleation density and the crystal growth rate and change of morphology of the diamond thin films synthesized by DC-plasma CVD (Chemical Vapor Deposition) under the hypergravity condition are confirmed. To explain the reason for these effects, in-situ plasma diagnostics that enables to identify the active species in the plasma is studied.
Keywordsdiamond film; vapor deposition; in-situ plasma diagnostic; crystal growth; plasma spectrum; gravitational effect; DC-plasma; synthesized diamond; Raman spectrum; rotating drum; ダイアモンド薄膜; 蒸着; プラズマその場診断; 結晶成長; プラズマスペクトル; 重力の影響; DCプラズマ; 合成ダイアモンド; ラマンスペクトル; 回転ドラム
Document TypeConference Paper
JAXA Categoryシンポジウム・研究会
SHI-NOAA0048095016
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/49936


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