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Pt thermal atomic layer deposition for silicon x-ray micropore optics
https://jaxa.repo.nii.ac.jp/records/29780
https://jaxa.repo.nii.ac.jp/records/29780a8c25316-6c40-47e0-931c-9ce1f6711660
Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2018-07-30 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Pt thermal atomic layer deposition for silicon x-ray micropore optics | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
武内, 数馬
× 武内, 数馬× 江副, 祐一郎× 石川, 久美× 沼澤, 正樹× 寺田, 優× 伊師, 大貴× 藤谷, 麻衣子× Sowa, Mark J.× 大橋, 隆哉× 満田, 和久× Takeuchi, Kazuma× Ezoe, Yuichiro× Ishikawa, Kumi× Numazawa, Masaki× Terada, Masaru× Ishi, Daiki× Fujitani, Maiko× Sowa, Mark J.× Ohashi, Takaya× Mitsuda, Kazuhisa |
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著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)宇宙物理学研究系 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
Veeco CNT | ||||||
著者所属 | ||||||
首都大学東京 | ||||||
著者所属 | ||||||
宇宙航空研究開発機構宇宙科学研究所(JAXA)(ISAS)宇宙物理学研究系 | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Space Astronomy and Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS) | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Veeco CNT | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Physics, Tokyo Metropolitan University | ||||||
著者所属(英) | ||||||
en | ||||||
Department of Space Astronomy and Astrophysics, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency(JAXA)(ISAS) | ||||||
出版者(英) | ||||||
出版者 | Optical Society of America | |||||
書誌情報 |
en : Applied Optics 巻 57, 号 12, p. 3237-3243, 発行日 2018-04-20 |
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内容記述(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Accepted: 2018-03-20 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1559-128X | |||||
ISSNONLINE | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 2155-3165 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543409 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://dx.doi.org/10.1364/AO.57.003237 | |||||
関連名称 | info:doi/10.1364/AO.57.003237 | |||||
資料番号 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 資料番号: SA1180003000 |