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タイトルReactively Deposited Aluminum Oxide and Fluoropolymer Filled Aluminum Oxide Protective Coatings for Polymers
本文(外部サイト)http://hdl.handle.net/2060/19960002734
著者(英)Rutledge, Sharon K.; Hunt, Jason; Banks, Bruce A.
著者所属(英)NASA Lewis Research Center
発行日1995-06-01
言語eng
内容記述Reactive ion beam sputter deposition of aluminum simultaneous with low energy arrival of oxygen ions at the deposition surface enables the formation of highly transparent aluminum oxide films. Thick (12 200 A), adherent, low stress, reactively deposited aluminum oxide films were found to provide some abrasion resistance to polycarbonate substrates. The reactively deposited aluminum oxide films are also slightly more hydrophobic and more transmitting in the UV than aluminum oxide deposited from an aluminum oxide target. Simultaneous reactive sputter deposition of aluminum along with polytetrafluoroethylene (PTFE Teflon) produces fluoropolymer-filled aluminum oxide films which are lower in stress, about the same in transmittance, but more wetting than reactively deposited aluminum oxide films. Deposition properties, processes and potential applications for these coatings will be discussed.
NASA分類AERODYNAMICS
レポートNO96N12743
NASA-TM-106966
NAS 1.15:106966
E-9722
権利No Copyright


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