| タイトル | Fabrication of micro-optical devices |
| 本文（外部サイト） | http://hdl.handle.net/2060/19940012878 |
| 著者（英） | Gal, George; Purdy, Don; Anderson, W. W.; Marley, J. |
| 著者所属（英） | Lockheed Missiles and Space Co. |
| 発行日 | 1993-08-01 |
| 言語 | eng |
| 内容記述 | We have fabricated a variety of micro-optic components including Fresnel and non-Frensel lenses, off-axis and dispersive lenses with binary stepped contours, and analog contours. Process details for all lens designs fabricated are given including multistep photolithography for binary fabrication and grayscale mask photolithography for analog fabrication. Reactive ion etching and ion beam milling are described for the binary fabrication process, while ion beam milling was used for the analog fabrication process. Examples of micro-optic components fabricated in both Si and CdTe substrates are given. |
| NASA分類 | OPTICS |
| レポートNO | 94N17351 |
| 権利 | No Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/115445 |
