| タイトル | Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining |
| DOI | https://doi.org/10.1063/1.1510573 |
| 本文（外部サイト） | https://ir.library.osaka-u.ac.jp/repo/ouka/all/85463/153105_1.pdf |
| 著者（英） | Yamauchi, Kazuto; Mimura, Hidekazu; Inagaki, Kouji; Mori, Yuzo |
| 発行日 | 2002-11 |
| 発行機関など | AIP Publishing |
| 刊行物名 | Review of Scientific Instruments |
| 巻 | 73 |
| 号 | 11 |
| 開始ページ | 4028 |
| 終了ページ | 4033 |
| 言語 | eng |
| 内容記述 | Kazuto Yamauchi, Hidekazu Mimura, Kouji Inagaki, and Yuzo Mori, "Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining", Review of Scientific Instruments 73, 4028-4033 (2002) https://doi.org/10.1063/1.1510573.
A numerically controlled elastic emission machining (EEM) system has been developed to fabricate ultraprecise optical components, particularly in x-ray optics. Nozzle-type EEM heads, by which a high shear-rate flow of ultrapure water can be generated on the work surface, have been newly proposed to transport the fine powder particles to the processing surface. Using this type of EEM head, the obtainable spatial resolution in figure correction can be changed by selecting the suitable aperture size of the nozzle according to the required spatial frequency. As a result of test figuring, 1 nm level peak-to-valley (p–v) accuracy is achieved throughout the entire spatial wavelength range longer than 0.3 mm. In addition, the microroughness of the processed surface is certified to also be approximately 1 nm (p–v). |
| 権利 | This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments and may be found at https://doi.org/10.1063/1.1510573. |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/1234976 |
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