| タイトル | Very high temperature silicon on silicon pressure transducers |
| 本文（外部サイト） | http://hdl.handle.net/2060/19930004491 |
| 著者（英） | Ned, Alexander; Kurtz, Anthony D.; Briggs, Stephen A.; Nunn, Timothy A. |
| 著者所属（英） | Kulite Semi-Conductor Products, Inc. |
| 発行日 | 1992-09-01 |
| 言語 | eng |
| 内容記述 | A silicon on silicon pressure sensor has been developed for use at very high temperatures (1000 F). The design principles used to fabricate the pressure sensor are outlined and results are presented of its high temperature performance. |
| NASA分類 | INSTRUMENTATION AND PHOTOGRAPHY |
| レポートNO | 93N13679 |
| 権利 | No Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/125123 |
