| タイトル | Highly automated optical characterization with FTIR spectrometry |
| 本文（外部サイト） | http://hdl.handle.net/2060/19890020141 |
| 著者（英） | Szofran, F. R.; Perry, G. L. E. |
| 著者所属（英） | NASA Marshall Space Flight Center |
| 発行日 | 1989-09-01 |
| 言語 | eng |
| 内容記述 | The procedure for evaluating the characteristics of II-VI semiconducting infrared sensor materials with a Fourier Transform Infrared (FTIR) spectrometer system will be discussed. While the method of mapping optical characteristics with a spectrometer has been employed previously, this system is highly automated compared to other systems where the optical transmission data are obtained using a FTIR system with a small stationary aperture in the optical path and moving the specimen behind the aperture. The hardware and software, including an algorithm developed for extracting cut-on wavelengths of spectra, as well as several example results, are described to illustrate the advanced level of the system. Additionally, data from transverse slices and longitudinal wafers of the aforementioned semiconductors will be used to show the accuracy of the system in predicting trends in materials such as shapes of growth interfaces and compositional uniformity. |
| NASA分類 | INORGANIC AND PHYSICAL CHEMISTRY |
| レポートNO | 89N29512
NAS 1.15:100379
NASA-TM-100379 |
| 権利 | No Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/140614 |
