タイトル | Development of advanced Czochralski growth process to produce low cost 150 kg silicon ingots from a single crucible for technology readiness |
本文(外部サイト) | http://hdl.handle.net/2060/19820024987 |
著者(英) | Lane, R. L. |
著者所属(英) | Jet Propulsion Lab., California Inst. of Tech.|Kayex Corp. |
発行日 | 1981-01-01 |
言語 | eng |
内容記述 | Six growth runs used the Kayex-Hameo Automatic Games Logic (AGILE) computer based system for growth from larger melts in the Mod CG2000. The implementation of the melt pyrometer sensor allowed for dip temperature monitoring and usage by the operator/AGILE system. Use of AGILE during recharge operations was successfully evaluated. The tendency of crystals to lose cylindrical shape (spiraling) continued to be a problem. The hygrometer was added to the Furnace Gas Analysis System and used on several growth runs. The gas chromatograph, including the integrator, was also used for more accurate carbon monoxide concentration measurements. Efforts continued for completing the automation of the total Gas Analysis System. An economic analysis, based on revised achievable straight growth rate, is presented. |
NASA分類 | ENERGY PRODUCTION AND CONVERSION |
レポートNO | 82N32863 QPR-5 NAS 1.26:169186 DRL-136 NASA-CR-169186 DRD-SE-5 |
権利 | No Copyright |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/164839 |