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タイトルDesign, processing, and testing of LSI arrays for space station
本文(外部サイト)http://hdl.handle.net/2060/19790017146
著者(英)Ipri, A. C.
著者所属(英)RCA Labs.
発行日1976-08-01
言語eng
内容記述The applicability of a particular process for the fabrication of large scale integrated circuits is described. Test arrays were designed, built, and tested, and then utilized. A set of optimum dimensions for LSI arrays was generated. The arrays were applied to yield improvement through process innovation, and additional applications were suggested in the areas of yield prediction, yield modeling, and process reliability.
NASA分類ELECTRONICS AND ELECTRICAL ENGINEERING
レポートNO79N25317
NASA-CR-150213
PRRL-76-CR-42
権利No Copyright
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/175371


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