タイトル | Design, processing, and testing of LSI arrays for space station |
本文(外部サイト) | http://hdl.handle.net/2060/19790017146 |
著者(英) | Ipri, A. C. |
著者所属(英) | RCA Labs. |
発行日 | 1976-08-01 |
言語 | eng |
内容記述 | The applicability of a particular process for the fabrication of large scale integrated circuits is described. Test arrays were designed, built, and tested, and then utilized. A set of optimum dimensions for LSI arrays was generated. The arrays were applied to yield improvement through process innovation, and additional applications were suggested in the areas of yield prediction, yield modeling, and process reliability. |
NASA分類 | ELECTRONICS AND ELECTRICAL ENGINEERING |
レポートNO | 79N25317 NASA-CR-150213 PRRL-76-CR-42 |
権利 | No Copyright |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/175371 |
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