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タイトルIon beam technology applications study
本文(外部サイト)http://hdl.handle.net/2060/19790004713
著者(英)Zafran, S.; Sellen, J. M., Jr.; Komatsu, G. K.
著者所属(英)TRW Defense and Space Systems Group
発行日1978-11-01
言語eng
内容記述Specific perceptions and possible ion beam technology applications were obtained as a result of a literature search and contact interviews with various institutions and individuals which took place over a 5-month period. The use of broad beam electron bombardment ion sources is assessed for materials deposition, removal, and alteration. Special techniques examined include: (1) cleaning, cutting, and texturing for surface treatment; (2) crosslinking of polymers, stress relief in deposited layers, and the creation of defect states in crystalline material by ion impact; and (3) ion implantation during epitaxial growth and the deposition of neutral materials sputtered by the ion beam. The aspects, advantages, and disadvantages of ion beam technology and the competitive role of alternative technologies are discussed.
NASA分類NUCLEAR AND HIGH-ENERGY PHYSICS
レポートNO79N12884
NASA-CR-159437
TRW-32100-6009-RU-00
権利No Copyright
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/177119


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