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タイトルDiffusion length measurements using the scanning electron microscope
本文(外部サイト)http://hdl.handle.net/2060/19750015942
著者(英)Weizer, V. G.
著者所属(英)NASA Lewis Research Center
発行日1975-01-01
言語eng
内容記述A measurement technique employing the scanning electron microscope is described in which values of the true bulk diffusion length are obtained. It is shown that surface recombination effects can be eliminated through the application of highly doped surface field layers. The influence of high injection level effects and low-high junction current generation on the resulting measurement was investigated. Close agreement is found between the diffusion lengths measured by this method and those obtained using a penetrating radiation technique.
NASA分類QUALITY ASSURANCE AND RELIABILITY
レポートNO75N24014
NASA-TM-X-71724
権利No Copyright
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/189983


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