| タイトル | Evaluation of Relative Volume Fraction of Tetragonal Phase and Rhombohedral Phase in Pb(Zr, Ti)O3 Film by Raman Spectroscopy |
| 著者（日） | 山本, 孝; 西出, 正道; 西田, 謙 |
| 著者（英） | Yamamoto, Takashi; Nishide, Masamichi; Nishida, Ken |
| 著者所属（日） | 防衛大学校; 防衛大学校; 防衛大学校 |
| 著者所属（英） | National Defense Academy; National Defense Academy; National Defense Academy |
| 発行日 | 2011-03-18 |
| 発行機関など | 防衛大学校
National Defense Academy |
| 刊行物名 | 防衛大学校紀要: 理工学編
Memoirs of the National Defense Academy: Science and Engineering |
| 巻 | 50 |
| 号 | 1-2 |
| 開始ページ | 17 |
| 終了ページ | 23 |
| 刊行年月日 | 2011-03-18 |
| 言語 | eng |
| 抄録 | Volume fractions of tetragonal phase (Vt) in the epitaxial Pb(Zr,Ti)O3 (PZT) thick films were evaluated using micro-Raman spectroscopy. The crystal structure was the single phase of tetragonal and rhombohedral when Zr/(Zr+Ti) ratio was under 0.43 and over 0.6, respectively. There was the two phases coexistence between 0.43 and 0.6 of Zr/(Zr+Ti) ratio. It was found that the dominant crystal phase change from tetragonal to rhombohedral one with increasingthe Zr/(Zr+Ti) ratio. However, crystal symmetry was not uniform; Vt was found to gradually change along film thickness direction from near the substrate to the film surface. |
| 内容記述 | 形態: 図版あり
Physical characteristics: Original contains illustrations |
| キーワード | Pb(Zr,Ti)O3; Tetragonal; Rhombohedral; MPB; Micro-Raman spectroscopy; Two-phase coexistence; Depth distribution |
| 資料種別 | Departmental Bulletin Paper |
| NASA分類 | Electronics and Electrical Engineering |
| ISSN | 1880-7739 |
| NCID | AA1218402X |
| SHI-NO | AA1440206003 |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/19508 |
