| タイトル | The Importance of Optical Pathlength Control for Plasma Absorption Measurements |
| 本文（外部サイト） | http://hdl.handle.net/2060/20020039148 |
| 著者（英） | Partridge, Harry; Sharma, Surendra P.; Meyyappan, M.; Cruden, Brett A.; Rao, M. V. V. S. |
| 著者所属（英） | NASA Ames Research Center|Eloret Corp. |
| 発行日 | 2001-01-01 |
| 言語 | eng |
| 内容記述 | An inductively coupled GEC Cell with modified viewing ports has been used to measure in-situ absorption in CF4 plasmas via Fourier Transform Infrared Spectroscopy, and the results compared to those obtained in a standard viewport configuration. The viewing ports were modified so that the window boundary is inside, rather than outside, of the GEC cell. Because the absorption obtained is a spatially integrated absorption, measurements made represent an averaging of absorbing species inside and outside of the plasma. This modification is made to reduce this spatial averaging and thus allow a more accurate estimation of neutral species concentrations and temperatures within the plasmas. By reducing this pathlength, we find that the apparent CF4 consumption increases from 65% to 95% and the apparent vibrational temperature of CF4 rises by 50-75 K. The apparent fraction of etch product SiF4 decreases from 4% to 2%. The data suggests that these density changes may be due to significant temperature gradients between the plasma and chamber viewports. |
| NASA分類 | Optics |
| 権利 | No Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/225256 |
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