AIREX: Fabrication of MEMS Microshutter Arrays for Cryogenic Applications

タイトル	Fabrication of MEMS Microshutter Arrays for Cryogenic Applications
本文（外部サイト）	http://hdl.handle.net/2060/20080039630
著者（英）	Bajikar, Sateesh; Kelly, Dan; Beamesderfer, Michael; Jhabvala, Murzy; Denis Kevin; Franz, Dave; Amatucci, Edward; Zincke, Chris; Kutyrev, Alexander; Ewin, Audrey; Ray, Chris; Oh, Lance; Smith, Wayne; Hess, Larry; Snodgrass, Steve; Valeriano, Veronica; Moseley, Harvey; Loughlin, Jim; Zheng, Yun; Fettig, Rainer; Schulte, Eric; Li, Mary J.; King, Todd; Kletetschkar, Gunther
著者所属（英）	NASA Goddard Space Flight Center
発行日	2006-09-17
言語	eng
内容記述	Two-dimensional MEMS microshutter arrays are being developed for use as a high contrast field selector for the Near Infrared Spectrograph (NIRSpec) on the James Webb Space Telescope (JWST). We present details of microshutter array fabrication and give results of work done to optimize the flatness of microshutter elements through film stress control for both room temperature and cryogenic (35K) operation.
NASA分類	Optics
権利	Copyright, Distribution as joint owner in the copyright