| タイトル | A Wafer-Bonded, Floating Element Shear-Stress Sensor Using a Geometric Moire Optical Transduction Technique |
| 本文（外部サイト） | http://hdl.handle.net/2060/20080018607 |
| 著者（英） | Tedjojuwono, Ken; Sheplak, Mark; Chen, Tai-An; Cattafesta, Louis; Horowitz, Stephen; Nishida, Toshikazu; Chandrasekaran, Venkataraman |
| 著者所属（英） | Florida Univ. |
| 発行日 | 2004-06-06 |
| 言語 | eng |
| 内容記述 | This paper presents a geometric Moir optical-based floating-element shear stress sensor for wind tunnel turbulence measurements. The sensor was fabricated using an aligned wafer-bond/thin-back process producing optical gratings on the backside of a floating element and on the top surface of the support wafer. Measured results indicate a static sensitivity of 0.26 microns/Pa, a resonant frequency of 1.7 kHz, and a noise floor of 6.2 mPa/(square root)Hz. |
| NASA分類 | Mechanical Engineering |
| 権利 | Copyright, Distribution as joint owner in the copyright |
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