タイトル | Laser processes for precise microfabrication of magnetic disk-drive components |
その他のタイトル | 磁気ディスク・ドライブコンポーネントの高精度マイクロファブリケーションのためのレーザー製法 |
著者(日) | Tam, Andrew C. |
著者(英) | Tam, Andrew C. |
著者所属(日) | IBM Corp. Almaden Research Center |
著者所属(英) | IBM Corp. Almaden Research Center |
発行日 | 2001-01 |
発行機関など | Institute of Physical and Chemical Research |
刊行物名 | RIKEN Review RIKEN Review |
号 | 32 |
開始ページ | 71 |
終了ページ | 76 |
刊行年月日 | 2001-01 |
言語 | eng |
抄録 | The technique of laser micro-processing has recently found several important and widespread applications in the manufacturing of disk-drive components. Examples provided here include the cleaning of surface contaminants, the formation of nano-bumps on disk surfaces for controlled surface texturing or for making nanometer-height standards, and the micro-bending of magnetic head sliders for flight-height controls. Short-pulsed laser irradiation at suitable wavelength, fluence, and incidence direction can be used to clean off particulate and organic-film contaminants from surfaces of critical components, for example, the slider and the disk. Controlled disk texturing is needed to alleviate the problem of stiction which occurs when the disk stop spinning and the super-smooth slider comes into stationary contact with the super-smooth disk. A compact laser operating at high pulse repetition rate can be used to produce a low-stiction landing zone composed of typically a million nano-bumps. This can be done both for NiP/aluminum disks, or for glass disks. Single isolated bump with 3 specified height for providing height-standard can also be tailor-made. Very recently, a laser curvature adjust technique has been developed and implemented into production of magnetic head sliders. Here, microscopic adjustments of the curvature of air bearing surface of sliders can be produced by suitable laser scribing at the back side of the ceramic slider. |
キーワード | laser machining; DOS; magnetic disk; surface contaminant; nano-bump; laser cleaning process; laser irradiation; KrF laser; microfabrication; research and development; SEM; position sensing detector; レーザーマシーニング; DOS; 磁気ディスク; 表面汚染物質; ナノバンプ; レーザー洗浄過程; レーザー照射; KrFレーザー; マイクロファブリケーション; 研究開発; SEM; 位置感知検出器 |
資料種別 | Conference Paper |
ISSN | 0919-3405 |
SHI-NO | AA0032140012 |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/27679 |