| タイトル | A back-illuminated megapixel CMOS image sensor |
| 著者（英） | Cunningham, Thomas; Jones, Todd; Pain, Bedabrata; Hoenk, Michael; Wrigley, Chris; Nikzad, Shouleh; Hancock, Bruce |
| 発行日 | 2005-06-09 |
| 言語 | eng |
| 内容記述 | In this paper, we present the test and characterization results for a back-illuminated megapixel CMOS imager. The imager pixel consists of a standard junction photodiode coupled to a three transistor-per-pixel switched source-follower readout [1]. The imager also consists of integrated timing and control and bias generation circuits, and provides analog output. The analog column-scan circuits were implemented in such a way that the imager could be configured to run in off-chip correlated double-sampling (CDS) mode. The imager was originally designed for normal front-illuminated operation, and was fabricated in a commercially available 0.5 pn triple-metal CMOS-imager compatible process. For backside illumination, the imager was thinned by etching away the substrate was etched away in a post-fabrication processing step. |
| NASA分類 | Electronics and Electrical Engineering |
| 権利 | Copyright |
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