タイトル | MSTAR: an absolute metrology sensor with sub-micron accuracy for space-based applications |
著者(英) | Peters, Robert D.; Lay, Oliver P.; Dubovitsky, Serge; Burger, Johan P.; Jeganathan, Muthu |
発行日 | 2004-03-01 |
言語 | eng |
内容記述 | The MSTAR sensor is a new system for measuring absolute distance, capable of resolving the integer cycle ambiguity of standard interferometers, and making it possible to measure distance with subnanometer accuracy. |
権利 | Copyright |
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