| タイトル | Mechanical Stress Effects on Electromigration Voiding in a Meandering Test Stripe |
| 著者（英） | Walsh, L. H.; Tai, B. H.; Lowry, L. E.; Mattila, J. |
| 発行日 | 1993-04-01 |
| 言語 | eng |
| 内容記述 | Earlier experimental findings concluded that electromigratin voids in these meandering stripe test structures were not randomly distributed and that void nucleation frequenly occurred sub-surface at the metal/thermal oxide interface. |
| 権利 | Copyright |
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