| タイトル | A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft |
| 著者（英） | Arakaki, G. A.; Rice, J. T.; Li, W. J.; Tang, T. K.; Kaiser, W. J.; Gutierrez, R. C.; Vorperian, V.; Chakraborty, I.; Wilcox, J. Z.; Stell, C. B.; Shceglov, K. |
| 発行日 | 1997-01-26 |
| 言語 | eng |
| 内容記述 | In this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested. |
| 権利 | Copyright |
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