| タイトル | Silicon Bulk Micromachined Vibratory Gyroscope |
| 著者（英） | Charkaborty, I.; Kaiser, W. J.; Tang, T. K.; Vorperian, V.; Li, W. J.; Wilcox, J. Z.; Stell, C.; Gutierrez, R. C.; Calvet, R.; Bartman, R. |
| 発行日 | 1996-06-02 |
| 言語 | eng |
| 内容記述 | This paper reports on design, modeling, fabrication, and characterization of a novel silicon bulk micromachined vibratory rate gyroscope designed for microspacecraft applications. The new microgyroscope consists of a silicon four leaf cloverstructure with a post attached to the center. |
| 権利 | Copyright |
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