| タイトル | A LIGA Fabricated Quadrupole Array for Mass Spectroscopy |
| 著者（英） | Brennen, R. A.; Hruby, J.; Chutjian, A.; Wiberg, D. V.; Jackson, K.; Fuerstenau, S.; Orient, O. J.; Bonivert, W.; Yee, K.; Hecht, M. H. |
| 発行日 | 1997-06-20 |
| 言語 | eng |
| 内容記述 | A linear array of nine quadrupoles was fabricated using the LIGA process. Pole heights ranging from 1 to 3 mm were fabricated using synchrotron X-ray exposures to form free standing polymethylmethacrylate (PMMA) molds into which copper, gold or nickel were electroplated. |
| 権利 | Copyright |
|
