AIREX: Characteristics of out gas on various surface treatments of OFC

タイトル	Characteristics of out gas on various surface treatments of OFC
その他のタイトル	OFCの種々の表面処理に対する気体放出特性
著者（日）	東　保男; 肥後　壽泰; 峠　暢一; 久米　達哉; 高田　耕治; 齊藤　芳男; 斉藤　健治; 山口　誠哉; 稲吉　さかえ
著者（英）	Higashi, Yasuo; Higo, Toshiyasu; Toge, Nobukazu; Kume, Tatsuya; Takata, Koji; Saito, Yoshio; Saito, Kenji; Yamaguchi, Seiya; Inayoshi, Sakae
著者所属（日）	高エネルギー加速器研究機構; 高エネルギー加速器研究機構; 高エネルギー加速器研究機構; 高エネルギー加速器研究機構; 高エネルギー加速器研究機構; 高エネルギー加速器研究機構; 高エネルギー加速器研究機構; 高エネルギー加速器研究機構; アルバック
著者所属（英）	High Energy Accelerator Research Organization; High Energy Accelerator Research Organization; High Energy Accelerator Research Organization; High Energy Accelerator Research Organization; High Energy Accelerator Research Organization; High Energy Accelerator Research Organization; High Energy Accelerator Research Organization; High Energy Accelerator Research Organization; ULVAC Inc.
発行日	2003-09
刊行物名	Proceedings of the APPI Winter Institute: The 8th Accelerator and Particle Physics Institute (APPI 2003) Proceedings of the APPI Winter Institute: The 8th Accelerator and Particle Physics Institute (APPI 2003)
開始ページ	162
終了ページ	165
刊行年月日	2003-09
言語	eng
抄録	The measurement results of out gas characteristics from various surface treatment of oxygen-free copper (OFC) are presented. The grade of the OFC meets the ASTM-F-68 and diamond turning for obtaining the mirror finish after 500 C annealing was employed before processing the various surface treatments. As the method of the surface treatment, diamond turn with cutting oil and without oil, etching, high-pressure pure water rinse were prepared. The heat-treated samples were prepared using hydrogen furnace and vacuum furnace.
キーワード	oxygen-free copper; outgassing; surface treatment; heat treatment; annealing; diamond turning; gas evolution distribution; furnace; 無酸素銅; 脱ガス; 表面処理; 熱処理; アニーリング; ダイヤモンド回転; 気体の時間分布; 炉
資料種別	Conference Paper
SHI-NO	AA0046494012
レポートNO	KEK-Proceedings-2003-6
URI	https://repository.exst.jaxa.jp/dspace/handle/a-is/30250