タイトル | Multilayer Thin-Film Microcapacitors |
著者(英) | Thakoor, Sarita; Karmon, Dan; Thakoor, Anil |
著者所属(英) | Jet Propulsion Lab., California Inst. of Tech. |
発行日 | 1995-09-01 |
言語 | eng |
内容記述 | Miniature capacitors containing multiple alternating thin-film dielectric and metal layers proposed, especially for use in integrated and hybrid electronic circuits. Because capacitance inversely proportional to thickness of dielectric layers, use of thin, high-quality dielectric layers affords capacitance and energy-storage densities much greater than now available. These devices much smaller and more reliable than state-of-art capacitors. |
NASA分類 | ELECTRONIC COMPONENTS AND CIRCUITS |
レポートNO | 95B10455 NPO-19403 |
権利 | No Copyright |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/305626 |