| タイトル | Tribological studies of amorphous hydrogenated carbon films in a vacuum, spacelike environment |
| 著者(英) | Miyoshi, Kazuhisa |
| 著者所属(英) | NASA Lewis Research Center |
| 発行日 | 1991-01-01 1991 |
| 言語 | eng |
| 内容記述 | Recent work on the adhesion and friction properties of plasma-deposited amorphous hydrogenated carbon films and their dependence on preparation conditions are reviewed. The results of the study indicate that plasma deposition enables one to deposit a variety of amorphous hydrogenated carbon (a-C:H) exhibiting diamondlike friction behavior. The plasma-deposited a-C:H films can be effectively used as hard lubricating films on ceramic materials such as silicon nitride in vacuum. |
| NASA分類 | NONMETALLIC MATERIALS |
| レポートNO | 93A40630 |
| 権利 | Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/317093 |
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