| タイトル | Surface morphologies and photoluminescence of diamond films deposited in a hot filament reactor |
| 著者（英） | Tzeng, Y.; Phillips, R.; Joseph, A. J.; Srivinyunon, T.; Cutshaw, C. |
| 著者所属（英） | NASA Lewis Research Center |
| 発行日 | 1991-01-01 |
| 言語 | eng |
| 内容記述 | A diamond film made of (100)-oriented diamond crystallites has relatively flat surfaces in parallel with the silicon surface. This is desirable because it provides a smoother surface of the diamond film. The difficulty in retaining the (100)-oriented diamond crystallites is strongly influenced by the growth temperature. This paper reports the results from a study on the surface morphologies of diamond films deposited in a hot filament reactor at reduced substrate temperature compared to that deposited at higher temperature. |
| NASA分類 | SOLID-STATE PHYSICS |
| レポートNO | 92A42858 |
| 権利 | Copyright |
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