| タイトル | Angstrom level profilometry for sub-millimeter to meter scale surface errors |
| 著者（英） | Glenn, Paul |
| 著者所属（英） | Bauer Associates |
| 発行日 | 1990-01-01 |
| 言語 | eng |
| 内容記述 | A versatile noncontacting profilimetry approach is defined which involves the measurement of the local curvature of a test piece by simultaneously measuring its slope at two slightly displaced locations. Several extensions of the measurement technique are emphasized including beam expansion for long scans, measurement of circularity and cone angle of near cylindrical optics, and measurement of absolute flatness. |
| NASA分類 | INSTRUMENTATION AND PHOTOGRAPHY |
| レポートNO | 92A17460 |
| 権利 | Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/330637 |
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