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タイトル0.4 Microns Spatial Resolution with 1 GHz (lambda = 30 cm) Evanescent Microwave Probe
著者(英)Su, D.-P.; Tabib-Azar, M.; Ponchak, George E.; LeClair, S. R.; Pohar, A.
著者所属(英)NASA Lewis Research Center
発行日1999-03-01
言語eng
内容記述In this article we describe evanescent field imaging of material nonuniformities with a record resolution of 0.4 microns at 1 GHz (lambda(sub g)/750000), using a resonant stripline scanning microwave probe. A chemically etched tip is used as a point-like evanescent field emitter and a probe-sample distance modulation is employed to improve the signal-to-noise ratio. Images obtained by evanescent microwave probe, by optical microscope, and by scanning tunneling microscope are presented for comparison. Probe was calibrated to perform quantitative conductivity measurements. The principal factors affecting the ultimate resolution of evanescent microwave probe are also discussed.
NASA分類Instrumentation and Photography
権利Copyright
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/341063


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