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タイトルPerformance of multilayer coated diffraction gratings in the EUV
著者(英)Thomas, Roger J.; Gum, Jeffrey S.; Condor, Charles E.; Keski-Kuha, Ritva A. M.
著者所属(英)NASA Goddard Space Flight Center
発行日1990-11-01
言語eng
内容記述The effect of multilayer coating application on the performance of a diffraction grating in the EUV spectral region was evaluated by examining the performance of a 3600-line/mm and a 1200-line/mm replica blazed gratings, designed for operation in the 300-A spectral region in first order. A ten-layer IrSi multilayer optimized for 304 A was deposited using electron-beam evaporation. The grating efficiency was measured on the SURF II calibration beamline in a chamber designed for calibrating the solar EUV rocket telescope and spectrograph multilayer coatings. A significant (by a factor of about 7) enhancement in grating efficiency in the 300-A region was demonstrated.
NASA分類OPTICS
レポートNO91A16202
権利Copyright
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/351634


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