| タイトル | NbN/MgO/NbN edge-geometry tunnel junctions |
| 著者（英） | Cypher, S. R.; Hunt, B. D.; Judas, A.; Stern, J. A.; Leduc, H. G. |
| 著者所属（英） | Jet Propulsion Lab., California Inst. of Tech.|Massachusetts Inst. of Tech. |
| 発行日 | 1989-07-03 |
| 言語 | eng |
| 内容記述 | The fabrication and low-frequency testing of the first edge-geometry NbN/MgO/NbN superconducting tunnel junctions are reported. The use of an edge geometry allows very small junction areas to be obtained, while the all-NbN electrodes permit operation at 8-10 K with a potential maximum operating frequency above 1 THz. Edge definition in the base NbN film was accomplished utilizing Ar ion milling with an Al2O3 milling mask, followed by a lower energy ion cleaning step. This process has produced all-refractory-material tunnel junctions with areas as small as 0.1 sq micron, resistance-area products less than 21 ohm sq micron, and subgap to normal state resistance ratios larger than 18. |
| NASA分類 | ELECTRONICS AND ELECTRICAL ENGINEERING |
| レポートNO | 89A45448 |
| 権利 | Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/362524 |
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