| タイトル | Automatic Replenishment Of Dopant In Silicon Growth |
| 著者（英） | Kochka, E. L. |
| 著者所属（英） | Jet Propulsion Lab., California Inst. of Tech. |
| 発行日 | 1988-07-01 |
| 言語 | eng |
| 内容記述 | Dopant incorporated feed pellets to maintain required concentration. Technique of continuous replenishment of dopant in silicon melt helps ensure correct resistivity in solid silicon grown from melt. Technique used in dendritic-web growth process in which ribbon of silicon continously pulled from molten material. Providing uniform doping and resistivity in ribbon technique enables production of high-quality silicon ribbon at high yields for use in semiconductor devices. |
| NASA分類 | MATERIALS |
| レポートNO | 88B10380
NPO-17138 |
| 権利 | No Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/375130 |
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