タイトル | Dual-Cathode Electron-Beam Source |
著者(英) | Bradley, James G.; Conley, Joseph M.; Wittry, David B. |
著者所属(英) | Jet Propulsion Lab., California Inst. of Tech. |
発行日 | 1988-06-01 |
言語 | eng |
内容記述 | Beam from either cathode electromagnetically aligned with exit port. Electron beam from either of two cathodes deflected by magnetic and electric fields to central axis. Mechanical alignment of beam easy because cathode axes, anode apertures, and electron trajectories coplanar. Applications where uninterrupted service needed: scanning electron microscopes, transmission electron microscopes, electron-beam lithography equipment, Auger instruments, and microfocused x-ray sources. |
NASA分類 | ELECTRONIC COMPONENTS AND CIRCUITS |
レポートNO | 88B10321 NPO-16878 |
権利 | No Copyright |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/375189 |
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