| タイトル | Submicron silicon powder production in an aerosol reactor |
| 著者（英） | Wu, J. J.; Flagan, R. C.; Gregory, O. J. |
| 著者所属（英） | California Inst. of Tech.|Rhode Island Univ. |
| 発行日 | 1986-07-14 |
| 言語 | eng |
| 内容記述 | Powder synthesis by thermally induced vapor phase reactions is described. The powder generated by this technique consists of spherical, nonagglomerated particles of high purity. The particles are uniform in size, in the 0.1-0.2-micron size range. Most of the particles are crystalline spheres. A small fraction of the spheres are amorphous. Chain agglomerates account for less than 1 percent of the spherules. |
| NASA分類 | NONMETALLIC MATERIALS |
| レポートNO | 86A46627 |
| 権利 | Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/383309 |
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