| タイトル | Planar techniques for fabricating X-ray diffraction gratings and zone plates |
| 著者（英） | Hawryluk, A. M.; Anderson, E. H.; Schattenburg, M. L.; Smith, H. I. |
| 著者所属（英） | Massachusetts Inst. of Tech. |
| 発行日 | 1984-01-01 |
| 言語 | eng |
| 内容記述 | The state of current planar techniques in the fabrication of Fresnel zone plates and diffraction gratings is reviewed. Among the fabrication techniques described are multilayer resist techniques; scanning electron beam lithography; and holographic lithography. Consideration is also given to: X-ray lithography; ion beam lithography; and electroplating. SEM photographs of the undercut profiles obtained in a type AZ 135OB photoresistor by holographic lithography are provided. |
| NASA分類 | ELECTRONICS AND ELECTRICAL ENGINEERING |
| レポートNO | 85A43275 |
| 権利 | Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/390246 |
