タイトル | Adjustable Lid Aids Silicon-Ribbon Growth |
著者(英) | Steidensticker, R. G.; Duncan, C. S.; Mchugh, J. P. |
著者所属(英) | Jet Propulsion Lab., California Inst. of Tech. |
発行日 | 1985-10-01 |
言語 | eng |
内容記述 | Closely-spaced crucible cover speeds up solidification. Growth rate of dendritic-web silicon ribbon from molten silicon increased by controlling distance between crucible susceptor lid and liquid/solid interface. Lid held in relatively high position when crucible newly filled with chunks of polycrystalline silicon. As silicon melts and forms pool of liquid at lower level, lid gradually lowered. |
NASA分類 | FABRICATION TECHNOLOGY |
レポートNO | 85B10275 NPO-16354 |
権利 | No Copyright |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/395777 |
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