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タイトルMinimum wafer thickness by rotated ingot ID wafering
著者(英)Chen, C. P.; Leipold, M. H.
著者所属(英)Jet Propulsion Lab., California Inst. of Tech.
発行日1984-01-01
言語eng
内容記述The efficient utilization of materials is critical to certain device applications such as silicon for photovoltaics or diodes and gallium-gadolinium-garnet for memories. A variety of slicing techniques has been investigated to minimize wafer thickness and wafer kerf. This paper presents the results of analyses of ID wafering of rotated ingots based on predicted fracture behavior of the wafer as a result of forces during wafering and the properties of the device material. The analytical model indicated that the minimum wafer thickness is controlled by the depth of surface damage and the applied cantilever force. Both of these factors should be minimized. For silicon, a minimum thickness was found to be approximately 200 x 10 - 6th m for conventional sizes of rotated ingot wafering. Fractures through the thickness of the wafer rather than through the center supporting column were found to limit the minimum wafer thickness. The model suggested that the use of a vacuum chuck on the wafer surface to enhance cleavage fracture of the center supporting core and, with silicon, by using 111-line-type ingots could have potential for reducing minimum wafer thickness.
NASA分類SOLID-STATE PHYSICS
レポートNO84A31114
権利Copyright
URIhttps://repository.exst.jaxa.jp/dspace/handle/a-is/398444


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