タイトル | Light source technology: Atom optics and atom lithography |
その他のタイトル | 光源技術:原子光学と原子リソグラフィー |
著者(日) | 大向 隆三; 渡辺 昌良 |
著者(英) | Omukai, Ryuzo; Watanabe, Masayoshi |
著者所属(日) | 情報通信研究機構 基礎先端部門 関西先端研究センター; 情報通信研究機構 基礎先端部門 関西先端研究センター |
著者所属(英) | National Institute of Information and Communications Technology Kansai Advanced Research Center, Basic and Advanced Research Department; National Institute of Information and Communications Technology Kansai Advanced Research Center, Basic and Advanced Research Department |
発行日 | 2005-02-21 |
発行機関など | National Institute of Information and Communications Technology 情報通信研究機構 |
刊行物名 | Journal of the National Institute of Information and Communications Technology 情報通信研究機構英文論文集 |
巻 | 51 |
号 | 1-2 |
開始ページ | 17 |
終了ページ | 25 |
刊行年月日 | 2005-02-21 |
言語 | eng |
抄録 | High-resolution atomic channeling using velocity-selected atoms may be able to overcome precision limitations of the conventional atom lithography. There has been experimentally clarified the dependence of line width and contrast of atomic patterns in the channeling region on the velocity spread of the atomic source for the first time. Thermal or velocity-selected atomic beams prepared with a one-dimensional magneto-optical trap were employed as the atomic sources. It can be shown that narrower line width and higher contrast atomic patterns are obtained as the velocity spread becomes narrower. Also successfully produced are periodic ytterbium (Yb) narrow lines on a substrate using a near-resonant laser light and the direct-write atom lithography technique. Clearly observed is a grating pattern of Yb atoms fabricated on a substrate with a line separation of approximately 200 nm after examining the surtface of the substrate with an atomic force microscopy. This is the first demonstration of nanofabrication using the atom-optical approach with Yb atoms. |
キーワード | atom optics; atom lithography; atomic beam; magneto-optical trap; ytterbium; atomic channeling; optical pumping; Doppler cooling; 原子オプティクス; 原子リソグラフィー; 原子ビーム; 磁気光学トラップ; イッテルビウム; 原子チャネリング; 光ポンピング; ドップラー冷却 |
資料種別 | Technical Report |
ISSN | 1349-3205 |
SHI-NO | AA0047764002 |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/39927 |