| タイトル | Modified Fabrication for InGaAsP Strip Laser |
| 著者（英） | Furman, T. R.; Ladany, I. |
| 著者所属（英） | NASA Langley Research Center |
| 発行日 | 1984-12-01 |
| 言語 | eng |
| 内容記述 | Improved fabrication of InGaAsP stripe lasers involves replacement of oxide stripe in quaternary laser by an n-type layer of InP grown on top of quaternary cap layer. Process allows use of stop etch that selectively removes InP and does not etch InGaAsP, making fabrication especially convenient. |
| NASA分類 | FABRICATION TECHNOLOGY |
| レポートNO | 83B10705
LAR-12986 |
| 権利 | No Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/407781 |
