タイトル | Starting Silicon-Ribbon Growth Automatically |
著者(英) | Mchugh, J. P. |
著者所属(英) | Jet Propulsion Lab., California Inst. of Tech. |
発行日 | 1984-04-01 |
言語 | eng |
内容記述 | Semiautomatic system starts growth of silicon sheets more reliably than system with purely manual control. Control signals for starting sheetcrystal growth consist of ramps (during which signal changes linearly from one value to another over preset time interval) and soaks (during which signal remains constant). Ramps and soaks for best temperature and pulling speed determined by experimentation. |
NASA分類 | FABRICATION TECHNOLOGY |
レポートNO | 83B10458 NPO-15919 |
権利 | No Copyright |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/408027 |
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