| タイトル | 3D microstructuring inside Foturan glass by femtosecond laser |
| その他のタイトル | フェムト秒レーザによるFoturanガラス内部の3次元顕微鏡構造形成 |
| 著者（日） | Cheng, Ya; 杉岡 幸次; 増田 雅史; 豊田 浩一; 河内 雅子; 四方山 和彦; 緑川 克美 |
| 著者（英） | Cheng, Ya; Sugioka, Koji; Masuda, Masashi; Toyoda, Koichi; Kawachi, Masako; Shihoyama, Kazuhiko; Midorikawa, Katsumi |
| 著者所属（日） | 理化学研究所 レーザー物理工学研究室; 理化学研究所 レーザー物理工学研究室; 理化学研究所 レーザー物理工学研究室; 東京理科大学 基礎工学部 電子応用工学科; HOYAフォトニクス; HOYAフォトニクス; 理化学研究所 レーザー物理工学研究室 |
| 著者所属（英） | Institute of Physical and Chemical Research Laser Technology Laboratory; Institute of Physical and Chemical Research Laser Technology Laboratory; Institute of Physical and Chemical Research Laser Technology Laboratory; Tokyo University of Science Department of Applied Electronics, Faculty of Industrial Science and Technology; HOYA PHOTONICS CORPORATION; HOYA PHOTONICS CORPORATION; Institute of Physical and Chemical Research Laser Technology Laboratory |
| 発行日 | 2003-01 |
| 発行機関など | Institute of Physical and Chemical Research |
| 刊行物名 | RIKEN Review
RIKEN Review |
| 号 | 50 |
| 開始ページ | 101 |
| 終了ページ | 106 |
| 刊行年月日 | 2003-01 |
| 言語 | eng |
| 抄録 | It is shown that femtosecond (fs) laser enables production of true three-dimensional (3D) microstructures inside a photosensitive glass (Foturan), which has superior properties on transparency, hardness, and chemical and thermal resistances. Exposure to the focused laser beam writes latent images inside the glass. Modified regions are developed by a post baking process and then preferentially etched away in dilute hydrofluoric (HF) acid. In general, an embedded microchannel fabricated by focal beam scanning perpendicularly to the laser beam becomes an elliptical shape with a cross section of large aspect ratio. It is demonstrated that the aspect ratio can be improved by using two advanced irradiation methods. |
| キーワード | femtosecond laser pulse; ultrashort pulsed laser; Foturan glass; microstructure; photosensitive glass; transparent material; multiphoton excitation; フェムト秒レーザパルス; 極短パルスレーザ; Foturanガラス; 顕微鏡構造; 感光性ガラス; 透過性材料; 多光子励起 |
| 資料種別 | Conference Paper |
| ISSN | 0919-3405 |
| SHI-NO | AA0045001018 |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/40851 |
