| タイトル | Self-heated thermocouples for far-infrared detection |
| 著者（英） | Rutledge, D. B.; Neikirk, D. P. |
| 著者所属（英） | California Inst. of Tech. |
| 発行日 | 1982-09-01 |
| 言語 | eng |
| 内容記述 | A novel self-heated Bi-Sb thermocouple for far-infrared detection has been developed. The detector is suitable for integration with monolithic antennas and imaging arrays. The device is fabricated in a single photolithography masking step using a photoresist-bridge technique. This bridge technique has also been used to make microbolometers with lower 1/f noise than those made by two conventional masking steps. The thermocouples have a noise equivalent power of 7 x 10 to the -10th W/sq rt of Hz and a 3-dB frequency response of 150 kHz. |
| NASA分類 | ELECTRONICS AND ELECTRICAL ENGINEERING |
| レポートNO | 82A44380 |
| 権利 | Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/409077 |
