| タイトル | Recharging the Silicon Crucible in a Hot Furnace |
| 著者（英） | Lane, R. L. |
| 著者所属（英） | Jet Propulsion Lab., California Inst. of Tech. |
| 発行日 | 1982-09-01 |
| 言語 | eng |
| 内容記述 | "Melt recharger" adds raw silicon to crucible in crystal-growing furnace without disturbing inert-gas atmosphere or significantly lowering temperature of melt. Crucible-refill hopper is lowered into hot zone of crystal-pulling chamber through an isolation valve. Cable that supports hopper is fastened to cone-shaped stopper in bottom of hopper. Stopper moves out of opening in hopper, allowing part of polysilicon charge to drop into crucible. |
| NASA分類 | FABRICATION TECHNOLOGY |
| レポートNO | 81B10093
NPO-14980 |
| 権利 | No Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/419971 |
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