タイトル | Cathodoluminescence of Al/x/Ga/1-x/As grown by liquid-phase epitaxy |
著者(英) | Levin, E. R.; Ladany, I. |
著者所属(英) | Radio Corp. of America |
発行日 | 1978-06-01 |
言語 | eng |
内容記述 | Small-area contrast fluctuations observed in cathodoluminescence-mode SEM images of thin Al(x)Ga(1-x)As layers grown by liquid-phase epitaxy on GaAs:Cr substrates are attributed to local variations in alloy composition. Quantitative estimates of the composition excursions are obtained from the variations in CL intensity by calibration against compositions known from electron-probe microanalysis. In a typical sample, the CL variations are shown to correspond to peak-to-peak fluctuations of about 1 at. % of Al and occur over irregular regions generally in the range 6-20 microns in diameter. |
NASA分類 | SOLID-STATE PHYSICS |
レポートNO | 78A38526 |
権利 | Copyright |
URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/432511 |
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