| タイトル | Some performance tests of a microarea AES |
| 著者（英） | Todd, G.; Poppa, H. |
| 著者所属（英） | NASA Ames Research Center |
| 発行日 | 1978-04-01 |
| 言語 | eng |
| 内容記述 | An Auger electron spectroscopy (AES) system which has a submicron analysis capability is described. The system provides secondary electron imaging, as well as micro- and macro-area AES. The resolution of the secondary electron image of an oxidized Al contact pad on a charge-coupled device chip indicates a primary beam size of about 1000 A. For Auger mapping, a useful resolution of about 4000 A is reported |
| NASA分類 | CHEMISTRY AND MATERIALS (GENERAL) |
| レポートNO | 78A36042 |
| 権利 | Copyright |
| URI | https://repository.exst.jaxa.jp/dspace/handle/a-is/432716 |
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